Cleaning equipment video1




Cleaning eqipment video

  • 1. 25 pieces HAND SCARA robot made from carbon fiber takes 25 pieces of wafer away …..
  • 2. 25 pieces of wafer mapping (where they are now)
  • 3. from 90 angle expansion vertical-transfer to the cleaning bath after 50 pieces of half pitch wafer
  • 4. Conveying 50 pieces of wafer between their robot baths.
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