Product outline

Product line up 

  • 200mm EP cleaning equipment
  • 200mm Pre-furnace cleaning equipment
  • 200mm back-seal cleaning equipment
  • 200mm PRE cleaning equipment
  • 200mm FINAL cleaning equipment
  • 300mm PRE cleaning equipment
  • 300mm PPOSTPOLISH cleaning equipment
  • 300mm POSTDSP cleaning equipment
  • 300mm Post/Pre epitaxial cleaning equipment
  • 300mm FINAL cleaning equipment
  • 450mm PRE cleaning equipment
  • 450mm FINAL cleaning equipment
  • Various of chemical liquid supplying units(NH4OH,H2O2,HCL,HF etc.)
  • ChemicAlyzer
Silicon Wafer cleaning equipment 

It is our main business to design, produce and install the cleaning equipment.
Provide a wide range of cleaning equipment which is applicable from 150mm, 200mm, 300mm, to the next generation,
450mm wafer.

Especially for the 300mm wafer cleaning equipment, such as FINAL cleaning equipment, we have a lot of sales achievements to the silicon wafer manufacturers.

It is our particular processing technology to clean the 25 pcs+ 25 pcs (50 pieces) wafers with 5mm pitch between each wafer.

The host communications, SECS(GEM and GEM300 are applicable)・SMIF・AGV&STOCKER・OHT is able to coordinate to P&P.

Chemical liquid processing and particle contamination will be definitely solved.

We propose our company’s original drying machine without using S/D and IPA.

Return Top